FRAUNHOFER INSTITUTE OF INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY (IISB)
General description
The Fraunhofer Institute of Integrated Systems and Device Technology (IISB) in Erlangen, Germany, conducts applied research and development as a partner for industry and public institutions. Founded in 1985, IISB is traditionally dedicated to semiconductor technology for micro- and nanoelectronics. IISB develops new processes and equipment for semiconductor processing in the whole front-end sector. This includes advanced processing steps for devices, test structures, analytical investigations, development and optimization of manufacturing equipment and materials, as well as simulation of semiconductor processes and devices. With a staff of more than 100, research is carried out in close cooperation with our industrial partners from large as well as small and medium-sized enterprises (SMEs). The equipment of the institute includes a vast variety of labs with all standard techniques of semiconductor processing, crystal growth and power electronics. Moreover, 1500 m^2 of high class cleanroom area are available, creating a unique environment for R&D at industrial standards.

 

Role in the project
Within this project, based on focused ion and electron beams, the IISB will develop processing steps for nanoscale manufacturing of scanning probes and will apply these techniques for the fabrication of application specific sensors. Material processing by focused particle beams will supplement micro engineering where structuring by conventional lithography fails. Therefore, material processing by focused particle beams will enable the development of novel scanning probes with functionalized tips as an essential component of novel instrumentation for the characterisation and manipulation on the nanometer scale. It is our objective to go further than proof of principle and to develop processing steps which can be combined with conventional fabrication techniques and will enable the reproducible processing of novel application specific probes. This work will be done in close cooperation with our partner Nanoworld Services GmbH.

 

www.iisb.fraunhofer.de

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